| 主权项 |
1. A corrosion-resistant multilayer ceramic member comprising:
a ceramic support substrate having a first surface, a second surface opposite to the first surface, and a side surface extending from the first surface to the second surface; an electrode layer formed on and in direct contact with the first surface of the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer covering and in direct contact with the electrode layer, the electrode layer being between the ceramic support substrate and the insulating protection layer; a ceramic protection substrate comprising:
a first portion provided on the insulating protection layer, the insulating protection layer being between the first portion of the ceramic protection substrate and the electrode layer,a second portion in direct contact with the first portion, the second portion extending in a direction from the first portion to at least the second surface of the ceramic support substrate, the second portion covering the side surface of the ceramic support substrate, anda third portion in direct contact with the second portion, the third portion extending over at least a portion of the second surface of the ceramic support substrate, the ceramic support substrate being between the first and thin portions of the ceramic protection substrate; and a cylindrical column attached to the third portion of the ceramic protection substrate, the cylindrical column housing least a portion of the power-supply member; wherein the ceramic support substrate, the ceramic protection substrate, and the insulating protection layer contain as a main component any one of aluminum nitride, rare earth oxide, aluminum oxide, silicon oxide, zirconia, and sialon. |
