发明名称 |
Pressure sensor using MEMS resonator |
摘要 |
A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value. |
申请公布号 |
US8826742(B2) |
申请公布日期 |
2014.09.09 |
申请号 |
US201314000673 |
申请日期 |
2013.02.12 |
申请人 |
Panasonic Corporation |
发明人 |
Nakamura Kunihiko |
分类号 |
G01B7/16;G01L1/16;B81B3/00;G01L1/10 |
主分类号 |
G01B7/16 |
代理机构 |
Wenderoth, Lind & Ponack, L.L.P. |
代理人 |
Wenderoth, Lind & Ponack, L.L.P. |
主权项 |
1. A pressure sensor employing a MEMS resonator, comprising:
a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit which determines a pressure acting on the MEMS resonator, based on the integrated value. |
地址 |
Osaka JP |