Micromechanical sensor

摘要

A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10). The at least one further radius of curvature (r2; r3; r4; r5; r7; r10) is situated between the meander (10) and the spring bar (9).

主权项

1. A micromechanical sensor, comprising:
a substrate; and at least one mass that rotates relative to an anchor that is connected to the substrate for detecting motions of the micromechanical sensor due to an acceleration force or a Coriolis force, wherein the at least one mass is coupled to the anchor by at least one bending spring; and the at least one bending spring comprises a spring bar and a meander, the meander having a circle of curvature that has an inner midpoint and a radius of curvature inside the meander, the meander having at least one further radius of curvature that has an outer midpoint outside the meander and is placed between the meander and the spring bar,
wherein the meander conforms overall to the at least one further radius of curvature having the outer midpoint by an angle greater than 90°.