发明名称 |
Method and apparatus for peeling electronic component |
摘要 |
A method of peeling an electronic component. The method includes a step of, when the electronic component is adhered onto a first main surface of a tape member, bringing a bellowphragm into contact with a second main surface, which is the other main surface of the tape member; and a step of, after the bellowphragm is brought into contact with the second main face, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm to thereby peel the electronic component from the tape member. |
申请公布号 |
US8828186(B2) |
申请公布日期 |
2014.09.09 |
申请号 |
US200912410712 |
申请日期 |
2009.03.25 |
申请人 |
Fujitsu Semiconductor Limited |
发明人 |
Konno Yoshito;Yamada Yutaka |
分类号 |
B29C63/00;H01L21/683;H01L21/67 |
主分类号 |
B29C63/00 |
代理机构 |
Westerman, Hattori, Daniels & Adrian, LLP |
代理人 |
Westerman, Hattori, Daniels & Adrian, LLP |
主权项 |
1. A method of peeling an electronic component, comprising:
bringing a bellowphragm into contact with a second main surface, which is a main surface of a tape member, when the electronic component is adhered onto a first main surface of the tape member, the first main surface is another main surface of the tape member; and after the bellowphragm is brought into contact with the second main surface, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm, so as to perform peeling the electronic component from the tape member while the electronic component is being vacuumed and held by a vacuum device; and detecting a rate of rise per unit time in pressure inside the bellowphragm by a gauge to measure a contact force by which the electronic component contacts the vacuum device. |
地址 |
Yokohama JP |