Method of making aluminum oxynitride coated article

摘要

A method for making a coated article wherein the method includes the following steps: providing a substrate; and depositing an aluminum oxynitride coating layer from a gaseous mixture. The gaseous mixture contains the following components: 30.0-65.0 volume percent nitrogen, 0.7-1.3 volume percent aluminum tri-chloride; 1.0-2.0 volume percent ammonia, 0.1-1.5 carbon dioxide, 1.5-4.5 volume percent hydrogen chloride, optional components of carbon monoxide and/or argon, and hydrogen as the balance.

主权项

1. A method for making a coated article, the method comprising the steps of:
providing a substrate; depositing an aluminum oxynitride coating layer from a gaseous mixture, the gaseous mixture comprising: nitrogen in an amount between about 30.0 volume percent and about 65.0 volume percent of the gaseous mixture; aluminum tri-chloride in an amount between about 0.7 volume percent and about 1.3 volume percent of the gaseous mixture; ammonia in an amount between about 1.0 volume percent and about 2.0 volume percent of the gaseous mixture; carbon dioxide in an amount between about 0.1 volume percent and about 1.5 volume percent of the gaseous mixture; hydrogen chloride in an amount between about 1.5 volume percent and about 4.5 volume percent of the gaseous mixture; carbon monoxide optionally in an amount between about 0 volume percent and about 2.0 volume percent of the gaseous mixture; argon optionally in an amount between about 0 volume percent and about 25 volume percent of the gaseous mixture; and hydrogen as the balance.