Piezoelectric actuator device

摘要

A piezoelectric actuator device includes a substrate anchor region; a support beam arrangement having first and second ends, wherein the first end is fixed to the anchor region and the second end is freely suspended; first and second beams having first and second ends, wherein the first end of each beam is mechanically fixed to at least a part of the second end of the support beam arrangement and the second end of each beam is freely suspended; a coupling beam mechanically coupling the second end of the first and second beams; wherein the first and second beams are arranged such that the first end of the support beam arrangement is located between the coupling beam and the second end of the support beam arrangement.

主权项

1. A piezoelectric actuator device, comprising:
a substrate comprising an anchor region; a support beam arrangement having a first end and a second end, wherein the first end is mechanically fixed to the anchor region, the support beam arrangement extends from its first end to its second end and the second end is freely suspended; a first beam having a first end and a second end, wherein the first end of the first beam is mechanically fixed to at least a part of the second end of the support beam arrangement and the second end of the first beam is freely suspended; a second beam having a first end and a second end, wherein the first end of the second beam is mechanically fixed to at least a part of the second end of the support beam arrangement and the second end of the second beam is freely suspended; a coupling beam mechanically coupling the second end of the first beam and the second end of the second beam; wherein the first beam and the second beam are arranged such that the first end of the support beam arrangement is located between the coupling beam and the second end of the support beam arrangement.