Layered structure and piezoelectric device using the same

摘要

A layered structure, including a flexible resin substrate and a composite piezoelectric film formed on the resin substrate and constituted by an organic polymer resin matrix and a plurality of inorganic piezoelectric bodies dispersed in the matrix.

主权项

1. A layered structure, comprising:
a resin substrate; and a composite piezoelectric film formed on the substrate and constituted by an organic polymer resin matrix and a plurality of inorganic piezoelectric bodies dispersed in the matrix, wherein the inorganic piezoelectric body is comprised of a perovskite oxide having a composition represented by the following General Formula (PX):
(Bix, A1−x)(By, C1−y)O3  (PX),where A is an A-site element other than Pb, and the A-site element having an average ionic valence of two, B is a B-site element with an average ionic valence of three, C is a B-site element with an average ionic valence of greater than three, and each of A, B, C is one or a plurality of kinds of metal elements, and O represents oxygen, and B and C have different compositions, and 0.6≦x≦1.0 and x−0.2≦y≦x, and although the ratio of a total mole number of the A-site element or of the B-site element to a mole number of the oxygen atoms is normally 1:3, the ratio may deviate from 1:3 within a range in which a perovskite structure can be obtained, and
wherein the A-site element A is at least one kind of metal element selected from the group consisting of Mg, Ca, Sr, Ba, (Na, Bi), and (K, Bi), and wherein the B-site element B is at least one kind of metal element selected from the group consisting of Al, Sc, Cr, Mn, Fe, Co, Ni, Cu, Ga, Y, In, and Re (rare earth element), and wherein a piezoelectric strain constant d33 (pm/V) and a relative permittivity ε33 of the inorganic piezoelectric body satisfy the following Formulae (1) and (2):
100<ε33 <1500  (1)d33(pm/V)>12 √ε33  (2).