发明名称 Method of fabricating micro-devices
摘要 A new and novel method utilizing current nano-technological processes for fabricating a range of micro-devices with significantly expanded capabilities, unique functionalities at microscopic levels, enhanced degree of flexibilities, reduced costs and improved performance in the fields of bioscience and medicine is disclosed in the within patent application. Micro-devices fabricated using the disclosed nano-technological techniques have significant improvements in many areas over the existing, conventional methods. Such improvements include, but are not limited to reduced overall costs, early disease detection, targeted drug delivery, targeted disease treatment and reduced degree of invasiveness in treatment. Compared with existing, conventional approaches, the said inventive approach disclosed in this patent application is much more microscopic, sensitive, accurate, precise, flexible and effective. This novel approach is able to deliver a superior level of performance in medical treatments over the existing modalities.;While microelectronic processes have been used for fabricating integrated circuit (“IC”) devices such as microprocessors, digital signal processors (“DSP”) and memory chips for the past two to three decades, their use has not been extended to most areas of bioscience and medicine. While there have been some application of micro-chips used in the area of laboratory diagnostic tests such as gene/DNA mapping and potential tests for diseases, their meaningful application in the areas of in-vivo diagnosis, drug delivery and disease treatments have not been utilized and are basically non-existent in the current state of the art. The disclosure herein utilizes these techniques to manufacture micro-devices for use in biological and medical applications as a microscopic way of treating disease.
申请公布号 US8828246(B2) 申请公布日期 2014.09.09
申请号 US201012707731 申请日期 2010.02.18
申请人 Anpac Bio-Medical Science Co., Ltd. 发明人 Yu Chris
分类号 H01B13/00 主分类号 H01B13/00
代理机构 Greenberg Traurig, LLP 代理人 Rao Weisun;Greenberg Traurig, LLP
主权项 1. A method of fabricating micro-devices for biological and medical applications, wherein the method uses microelectronics processes and comprises the following steps: providing a substrate material having a surface region; adding a deposit material to the surface region of said substrate material; patterning said deposit material using photolithography and/or etching processes to form a portion of recessed areas; depositing material S onto the surface region of said deposit material and filling said recessed areas; polishing material S via CMP to remove material S from top surface of said deposit material and leaving sufficient amount of material S in said recessed area coplanar with the top surface of said deposit material; depositing material C onto the surface region of material S and said deposit material;depositing material D onto the surface region of material C; patterning material D and material C which is selective to materials S; etching material S which is selective to the deposit material, the substrate, material C, and material D and then completely removing remaining material S to form a hollow container; filling container with desired compound; sealing said container by applying a film material to the surface of material D; and patterning material D and said film material which is selective to material C to form a micro-device with micro-container filled with desired compound.
地址 Tortola VG