发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING CURED RELIEF PATTERN, SEMICONDUCTOR DEVICE AND DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition containing a phenolic resin, which shows excellent storage stability, can be cured at a lower temperature, and gives a cured film that suppresses pattern abnormality even when a wafer with a cured relief pattern is subjected to a reflow process, to provide a method for producing a cured relief pattern for forming a pattern by using the photosensitive resin composition, and to provide a semiconductor device and a display device having the cured relief pattern.SOLUTION: There is provided a positive photosensitive resin composition comprising: (A) 100 pts.mass of a phenolic resin; (B) 0.01 to 20 pts.mass of at least one nitrogen-containing compound selected from a group consisting of a tetrazole compound and a purine compound; and (C) 0.1 to 70 pts.mass of a compound having a quinonediazide group. |
申请公布号 |
JP2014164050(A) |
申请公布日期 |
2014.09.08 |
申请号 |
JP20130033764 |
申请日期 |
2013.02.22 |
申请人 |
ASAHI KASEI E-MATERIALS CORP |
发明人 |
OKUDA TOSHIAKI;SASAKI TAKAHIRO |
分类号 |
G03F7/004;C08K5/22;C08K5/3467;C08L61/04;G03F7/023;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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