| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device which can perform measurement with high accuracy by an inexpensive structure.SOLUTION: An inspection device for inspecting a sample by deflecting an electron beam and has: an electron gun for emitting the electron beam; a deflector 109 for deflecting electron beams; a deflection control unit 101 for controlling the deflector; a digital/analog converter 102 for converting a deflection signal of the deflection control unit 101 into an analog signal; an inverted amplifier 103 for changing polarity of an output signal of the digital/analog converter 102 and outputting the signal; a non-inverted amplifier 106 for outputting the output signal of the digital/analog converter 102 without changing the polarity; variable delay parts 104 and 107 for varying a delay amount of a signal; and a delay control unit 110 for controlling delay amounts of the variable delay parts 104 and 107. The delay amounts of the variable delay parts 104 and 107 are adjusted by control by the delay control unit 110, so that delay difference between the inverted amplifier 103 and the non-inverted amplifier 106 is eliminated, and an astigmatic error is cancelled highly accurately and inexpensively. |
