OPTICAL SEMICONDUCTOR DEVICE AND OPTICAL SEMICONDUCTOR DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a PD array having a plurality of light-receiving parts which can reduce cross talk to a further degree; and provide a method of manufacturing a PD array simpler and at low cost.SOLUTION: An optical semiconductor device of the present embodiment comprises: an optical semiconductor element in which a plurality of optical elements each composed of a semiconductor junction layer formed in a semiconductor composite layer laminated on a semiconductor substrate; and a base plate joined to the semiconductor substrate, in which a groove piercing the semiconductor composite layer and the semiconductor substrate to reach the base plate is formed every between neighboring optical elements formed in the optical semiconductor element.