FORCE DETECTION DEVICE, ROBOT, ELECTRONIC COMPONENT TRANSPORT DEVICE, ELECTRONIC COMPONENT INSPECTION DEVICE, COMPONENT PROCESSING DEVICE AND MOVING BODY

摘要

PROBLEM TO BE SOLVED: To provide a force detection device in which an output drift is reduced and the size is reduced, a robot using the force detection device, an electronic component transport device, an electronic component inspection device, a component processing device and a moving body.SOLUTION: A force detection device 1a includes: a first element 3a and a second element 3b for outputting a voltage according to an external force; and an external force detection circuit for detecting the external force on the basis of the voltage output from the first element 3a and the second element 3b. The first element 3a and the second element 3b have: a sensor having polarization axes P&bgr;1 and P&bgr;2, and outputting charges according to the external force along the polarization axes P&bgr;1 and P&bgr;2; and a conversion circuit for converting the charges output from the sensor to a voltage. The first element 3a and the second element 3b are arranged in such a manner that the direction of the polarization axis P&bgr;1 which the sensor of the first element 3a has and the direction of the polarization axis P&bgr;2 which the sensor of the second element 3b has face the opposite directions mutually.