发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which a short circuit between a bump and a metal wiring does not occur.SOLUTION: The semiconductor device comprises: a metal wiring 110 in a top layer; a pad metal in a same layer as the metal wiring 110; a side spacer 130 provided in a sidewall of the metal wiring 110; a protective film 120 which is provided on the metal wiring 110 and the side spacer 130 and has an opening from which the pad metal is exposed; and a bump provided on the pad metal and the protective film 120.
申请公布号 JP2014165276(A) 申请公布日期 2014.09.08
申请号 JP20130033598 申请日期 2013.02.22
申请人 SEIKO INSTRUMENTS INC 发明人 SOMEYA TETSUO
分类号 H01L21/60;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/60
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