发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor chip having high productivity capable of reducing warpage of a semiconductor wafer to such a degree that machine transportation becomes possible.SOLUTION: A method of manufacturing a semiconductor chip having a protection film on a non-circuit surface of the semiconductor chip, includes a step of adhering a protection film for a semiconductor wafer on the non-circuit surface side of the semiconductor wafer in which a device for ejecting the semiconductor chip is formed on one surface, and preparatorily dicing the semiconductor wafer to which the protection film for a semiconductor wafer is adhered, from the circuit surface side to cut only the semiconductor wafer and not to cut the protection film for a semiconductor wafer.
申请公布号 JP2014165200(A) 申请公布日期 2014.09.08
申请号 JP20130032240 申请日期 2013.02.21
申请人 SHIN ETSU CHEM CO LTD 发明人 ICHIROKU NOBUHIRO
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
地址