| 摘要 |
PROBLEM TO BE SOLVED: To prevent damages of a substrate.SOLUTION: A substrate transfer device according to one embodiment includes multiple nozzles and a body part. The multiple nozzles jet a gas toward a surface of a substrate and thereby hold the substrate in a non-contact manner. The body part is provided with the multiple nozzles. Further, in each nozzle, at least a surface is formed by a resin. |
