| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector capable of suppressing the deterioration of a deflection angle of the optical deflector, and accurately detecting the deflection angle of the optical deflector.SOLUTION: An optical deflector A1 includes: a moving portion 9 for supporting a reflecting portion 1 having an optical reflection surface 1b formed by a metallic thin film; a supporting base body 11 for supporting the moving portion 9; and outside piezoelectric actuators 101 and 102 for rocking the moving portion 9 about a second shaft X2 by piezoelectric drive. The outside piezoelectric actuators 101 and 102 are equipped with a plurality of piezoelectric cantilevers 31-34 which support a driving piezoelectric body 61 and bent and deformed with the driving piezoelectric body 61. The plurality of piezoelectric cantilevers 31-34 are coupled at end portions so as to accumulate each bending deformation. The moving portion 9 is provided with detecting cantilevers 91 and 92 bent and deformed according to the rocking about the second shaft X2, and the detecting cantilevers 91 and 92 support a detecting piezoelectric body 62 bent and deformed with their bending deformation. |
