| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting a position of a beam scan area, which enables an operator to manually or automatically easily adjust the position of each split beam.SOLUTION: In a multi-beam laser scanning microscope which causes a plurality of beams split in time division to scan a plurality of scan areas A1 to A4 different by positions in an observation area and acquires an entire image by connecting images of respective scan areas, the method adjusts the positions of respective scan areas which respective beams scan, so that positions of images in respective scan areas in the entire image are consistent. In this method, a target 1 having a pattern crossing at least two positions on each of boundaries between adjacent scan areas is arranged at a focus position of an objective lens, and display images of the target 1 in respective scan areas which respective beams scan are used to adjust respective scan areas which respective beams scan, so that positions of the pattern of the target 1 on boundaries between display images of adjacent scan areas match each other. |
