| 摘要 |
PROBLEM TO BE SOLVED: To provide: a piezoelectric actuator substrate in which a through-hole area hardly peels off when the substrate is formed by adhesion-laminating a ceramic vibration plate and a piezoelectric ceramic layer; and a liquid ejection head and a recording apparatus each using the piezoelectric actuator substrate.SOLUTION: A piezoelectric actuator substrate 21 includes: a laminate in which a ceramic vibration plate 21a and at least one piezoelectric ceramic layer 21b are laminated; a first surface electrode 35 disposed on the principal surface on the piezoelectric ceramic layer 21b side; an internal electrode 34; a through-hole 38 which penetrates through the piezoelectric ceramic layer 21b and is connected to the internal electrode 34; and a second surface electrode 37 disposed on the principal surface on the piezoelectric ceramic layer 21b side so as to cover the through-hole 38. Recesses 39 are provided around the through-hole 39 in plan view in the principal surface on the ceramic vibration plate 21a side. |
