MANUFACTURING METHOD OF POLYCRYSTAL SILICON

摘要

PROBLEM TO BE SOLVED: To solve a problem that a Siemens method generally used for manufacturing polycrystal silicon has a low yield of polycrystal silicon and lacks effective means for reusing a large amount of tetrachlorosilane a byproduct.SOLUTION: A manufacturing method of polycrystal silicon to solve the problem includes a preceding step mainly composed of a Siemens method and a post-step mainly composed of a zinc reduction method to use as a raw material tetrachlorosilane a byproduct in the preceding step.