| 摘要 |
PROBLEM TO BE SOLVED: To provide an application device which can stably and accurately measure a small application amount applied on a substrate.SOLUTION: An application device includes: a weight measuring part 2; a substrate conveying unit 4 which conveys a substrate 3 onto the weight measuring part 2 and arranges the substrate 3 on the weight measuring part 2; an application head 6 which applies an application material 5 on the substrate 3; and an application amount calculation part which calculates an application amount of the application material 5 applied on the substrate 3 on the basis of a result measured by the weight measuring part 2. The application amount calculation part carries out first measurement of measuring before the application material 5 is applied, and second measurement of measuring after the application material 5 is applied. |
