| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate with micropores in which manufacture efficiency is improved by increasing a laser light scanning speed and making an etching speed equal to or higher than the prior arts.SOLUTION: According to a method of manufacturing a substrate with micropores, a scanning speed of a focal point F of pulse laser light L is set to a predetermined value, and a repetition frequency of the laser light is adjusted in such a manner that a pulse pitch represented by an expression (1); pulse pitch (μm)={scanning speed (μm/sec) of laser light}/{repetition frequency (Hz) of laser light}, becomes 0.03 μm to 0.3 μm. A substrate 1 is irradiated with the laser light, and scanning is performed in a direction along an optical axis of laser light at a substantially fixed speed while shifting the focal point of the laser light so as to overlap the focal point for each pulse inside of the substrate. In a region through which the focal point passes, a modified part 2 is formed in which etching resistance is reduced, and the modified part is removed by etching treatment, thereby forming micropores on the substrate. |
