WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To reliably obtain conduction between a reflection film and a connection electrode and to improve connection reliability of wiring.SOLUTION: A wavelength variable interference filter is provided, including a first drive electrode 36 electrically connected to a first reflection film 35 and a second drive electrode 46 electrically connected to a second reflection film 45. The first drive electrode 36 is formed to have a thickness dimension greater than a thickness dimension of the first reflection film 35; and the second drive electrode 46 is formed to have a thickness dimension greater than a thickness dimension of the second reflection film 45. The first drive electrode 36 has a first step portion 37 in an end portion connected to the first reflection film 35, the step portion having a thickness dimension smaller than the thickness dimension of the first reflection film 35; and the second drive electrode 46 has a second step portion 47 in an end portion connected to the second reflection film 45, the step portion having a thickness dimension smaller than the thickness dimension of the second reflection film 45. The first reflection film 35 is formed to extend from a surface of a fixed substrate 30 to a surface of the first step portion 37; and the second reflection film 45 is formed to extend from a surface of a movable substrate 40 to a surface of the second step portion 47.