发明名称 |
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR |
摘要 |
A shower head assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is closely connected to the first surface of the back plate and includes a gas diffusion surface. An electrode is arranged in one of the back plate and the face plate and is connected to at least one conductor. A gas plenum is defined between the back plate and the face plate and is connected with a gas channel in order for a fluid to flow. The back plate and the face plate are made of a non-conductive material. |
申请公布号 |
KR20140108178(A) |
申请公布日期 |
2014.09.05 |
申请号 |
KR20140024538 |
申请日期 |
2014.02.28 |
申请人 |
NOVELLUS SYSTEMS, INC. |
发明人 |
MOHAMED SABRI;AUGUSTYNIAK EDWARD;KEIL DOUGLAS L.;LINGAMPALLI RAMKISHAN RAO;LEESER KARL;BARNETT CODY |
分类号 |
H01L21/205;H01L21/3065 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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