PARTICLE PROCESSING DEVICES USING MEMBRANE STRUCTURES

摘要

A microparticle processing device comprises: a chamber including a first inlet/outlet part and a second inlet/outlet part, and supplying a space in which a fluid including a microparticle flows; at least one variable thin film structure arranged within the chamber to process the microparticle located in the fluid; at least one thin film control line to apply a pressure to the variable thin film structure; and a fixed structure corresponding to the variable thin film structure, arranged within the chamber to perform a filtering of the microparticle by pairing with the variable thin film structure.