METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, METHOD OF PROCESSING A SUBSTRATE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

摘要

The present invention is to form a metal-containing film capable of adjusting a work function. A composite metal nitride film is formed on a high dielectric constant film by alternately supplying a first material including a first metal element and a halogen element and a second material including a second metal element different from the first metal element and an amino group, for a substrate in which the high dielectric constant film is formed.