| 摘要 |
Provided is a sample support device that is capable of precisely adjusting a sample height (Z) position to a target position. The sample support device (1) is a sample support device in which XY tables (5, 6) and a Z table (7) are arranged on a Z reference surface (4) which is a height standard and a sample (2) is supported with the Z table (7) so that the sample (2) is arranged at a predetermined height position. The sample support device (1) has a height correction unit (10) that controls a movement of the Z table (7), a Z sensor (11) that measures the height from the Z reference surface (4) is disposed on the Z reference surface (4), a measurement surface (12) is formed on the same axis as the measurement position of the sample (2), the height of the measurement surface (12) from the Z reference surface (4) is measured by the Z sensor (11), the Z table (7) is moved by the height correction unit (10) according to the height measurement value, and the sample (2) is arranged at a predetermined height position. |
