发明名称 |
PHOTONIC DEVICE STRUCTURE AND METHOD OF MANUFACTURE |
摘要 |
Disclosed method and apparatus embodiments provide a photonic device with optical isolation from a supporting substrate. A generally rectangular cavity (125) in cross section is provided below an element of the photonic device (129) and the element may be formed from a ledge of the supporting substrate which is over the cavity. |
申请公布号 |
WO2014133760(A1) |
申请公布日期 |
2014.09.04 |
申请号 |
WO2014US16009 |
申请日期 |
2014.02.12 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
SANDHU, GURTEJ;MEADE, ROY |
分类号 |
G02B6/136;G02B6/12 |
主分类号 |
G02B6/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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