FILM-FORMING DEVICE AND INJECTOR

摘要

A film-forming device provided with a transportation mechanism for transporting a substrate during film-forming, an injector unit in which a plurality of injectors for feeding a film-forming gas toward the substrate are provided along the path of transportation of the substrate, and a reaction substance feed unit for generating a reaction substance. The injector unit feeds the reaction substance from gaps between the injectors to layers of film-forming components. The substrate-facing surfaces of the injectors have: film-forming gas feed ports for outputting the film-forming gas; first gas exhaust ports for suctioning excess film-forming gas and other gases, the first gas exhaust ports being provided on both sides of the direction of transportation of the substrate in relation to the film-forming gas feed ports; and inert gas feed ports for feeding an inert gas, the inert gas feed ports being provided on the side distanced from the film-forming gas feed ports in relation to the corresponding first gas exhaust ports.