发明名称 SOURCE/DRAIN STACK STRESSOR FOR SEMICONDUCTOR DEVICE
摘要 The present disclosure provides a semiconductor device. The device includes a substrate, a fin structure formed by a first semiconductor material, a gate region on a portion of the fin, a source region and a drain region separated by the gate region on the substrate and a source/drain stack on the source and drain region. A low portion of the source/drain stack is formed by a second semiconductor material and it contacts a low portion of the fin in the gate region. An upper portion of the source/drain stack is formed by a third semiconductor material and it contacts an upper portion of the fin in the gate region.
申请公布号 KR101438290(B1) 申请公布日期 2014.09.04
申请号 KR20120153330 申请日期 2012.12.26
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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