发明名称 FINFET WITH DUMMY GATE ON NON-RECESSED SHALLOW TRENCH ISOLATION(STI)
摘要 An embodiment fin field effect transistor (FinFET) device includes fins formed from a semiconductor substrate, a non-recessed shallow trench isolation (STI) region disposed between the fins, and a dummy gate disposed on the non-recessed STI region.
申请公布号 KR101438291(B1) 申请公布日期 2014.09.04
申请号 KR20120155234 申请日期 2012.12.27
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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