| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and inexpensive optical measurement device that allows an image of a measurement object to be acquired without requiring a mirror scan, and without use of a wavelength scan type light source and a spectrometer.SOLUTION: A laser beam emitted from a light source 401 is branched into a first light flux and a second light flux, and the first light flux is converged onto a measurement object by a lens 406 as signal light to irradiate the measurement object 409. The measurement object is not irradiated with the second light flux, and is reflected by a mirror 411 as reference light. Reflecting or scattering signal light depending upon the measurement object multiplexes with the reference light, and multiplexing light is made incident to an interference optical system 412. Then, more than three pieces of interference light different in a phase relation from each other are generated, and detected by photo-detectors 417 and 422. A detection signal is computed by a signal process section 424. Upon measuring, a convergence position of the first light flux by the lens 406 scans at least in an optica axis direction. |
