| 摘要 |
PROBLEM TO BE SOLVED: To store a substrate appropriately for a cassette.SOLUTION: A substrate transfer apparatus according to an embodiment comprises: a substrate transfer part; a detection part; and a control device. The substrate transfer part delivers substrates to and from a cassette capable of storing a plurality of substrates. The detection part detects the substrate stored in the cassette. The control device controls the substrate transfer part. The control device includes a transfer control part, a determination part and a correction part. The transfer control part controls the substrate transfer part to store the substrate in a preliminarily fixed target storage position. The determination part determines after the detection part detects the substrate stored in the cassette, an actual storage position of the concerned substrate based on the detection result of the detection part. The correction part corrects, on the basis of a gap between the actual storage position and the target storage position of the substrate, the target storage position preliminarily fixed as a storage position of another substrate. |
