MICRODIAPHRAGM PUMP

摘要

A microdiaphragm pump having a diaphragm chamber in contact with one side of an intake valve and one side of a discharge valve. The microdiaphragm includes two valve plate sheets 12, in each of which a valve plate 14 of one of an intake valve 26 and a discharge valve 28 and a flow path aperture 16 that provides a passage of the other valve are formed and which are laminated in directions that are opposite from each other; two valve seat sheets 18, which are laminated to the laminate and in which valve seats 20 and valve stoppers 22 are formed; a base plate 32; a frame 34; a diaphragm 36; and a drive element 42. The microdiaphragm pump has extremely small external dimensions and provides high productivity, high flow control accuracy, a smooth operation, large suction and discharge forces, and high reliability.

主权项

1. A microdiaphragm pump which has a diaphragm chamber in contact with one side of an intake valve and a discharge valve, comprising:
two valve plate sheets, in each of which a valve plate of one of the intake valve and the discharge valve and a flow path aperture that provides a flow path of the other valve are formed and which are laminated in such directions that the valve plates and the flow path apertures face each other; two valve seat sheets, which are laminated to both surfaces of the laminate and in each of which a valve seat opposing the valve plate of the one valve plate sheet and a valve stopper opposing the valve plate of the other valve plate sheet are formed; a base plate which is superposed on one of the valve seat sheets and which has two flow paths in communication with the intake valve and the discharge valve; a frame which is superposed on the peripheral edge of the other valve seat sheet and which surrounds the intake valve and the discharge valve; a diaphragm which is superposed on the frame to form a diaphragm chamber between the diaphragm and the valve seat sheet on which the frame has been superposed; and a drive element retained on the diaphragm.