| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a spring system for a MEMS device.SOLUTION: A spring system includes stiff beams 76, 78, 80, 82 oriented to form a parallelogram arrangement 84 linking a pair of drive masses 30, 32 of a MEMS device 72. The beams are oriented diagonal to a drive direction 56 of the masses 30, 32. Diagonally opposing corners 86, 88 of the parallelogram arrangement 84 are coupled to the drive masses 30, 32. A spring 90 is coupled to a corner 94 of the parallelogram arrangement, and a spring 92 is coupled to a diagonally opposing corner 96. The springs 90, 92 are interconnected with a sense frame 34 surrounding the drive masses. The beams and side springs are stiff to substantially prevent in-phase motion of the drive masses. Rotationally compliant flexures 102, 104, 106, 108, allow the arrangement 84 to collapse and expand to enable anti-phase motion 60 of the drive masses.</p> |
