| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a process for fabricating a monolayer or multilayer metal structure in LIGA technology.SOLUTION: In the process, a photoresist layer is deposited on a flat metal substrate; a photoresist mold is created by irradiation or electron bombardment or ion bombardment; a metal or alloy is electroplated in this mold; the electroformed metal structure is detached from the substrate; and the photoresist is separated from this metal structure. In the process, the metal substrate is used as an agent involved in the forming of at least one surface of the metal structure other than a surface formed by the plane surface of the substrate.</p> |
