| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device structure and an assembly method capable of assembling a large-sized exposure device easily within a brief period.SOLUTION: An overall frame 50 supporting the provided exposure device and at least portions of the respective constituent members of devices annexed thereto is constituted by multiple units 52, 54, and 56. Moreover, the multiple units 52, 54, and 56 respectively support an illumination system IOP, stators 71a and 72a of a linear motor for driving a mask stage, and a mask transport device 90, for example. In this case, a sufficient strength necessary for the entire frame is secured by constructing a singular overall frame 50 from the multiple units 52, 54, and 56.</p> |
