Analysis device installed in laser processing machine for analyzing laser radiation, has beam sensor that analyzes laser radiation in main beam path, and optical devices that analyzes respective analysis beam aligned on beam sensor

摘要

The analysis device (100) has main beam path (AB) that is arranged with optical component (10). A main beam (S0) is provided optically adjusting the laser radiation. A beam sensor (3) is arranged for analyzing laser radiation in main beam path separate from observation beam path (BC). A partly transparent mirror (2) is arranged between optical component and beam sensor. Optical devices (20,30) are arranged for analyzing respective analysis beam (S1,S2) to be aligned on beam sensor.