METHOD AND DEVICE FOR TRIGGERING RESONANCE CHARGING CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide a new method/device for triggering a resonance charging circuit.SOLUTION: A method for triggering a resonance charging circuit for a device which generates short-wavelength radiation on the basis of a discharge plasma generated in a pulse shape calculates at least one second switching time by which a discharge switch of the resonance charging circuit is triggered so as to supply at an ignition time discharge voltage (U) for generating the discharge plasma and the ignition time for generating the discharge plasma. The device for triggering the resonance charging circuit for the device which generates short-wavelength radiation on the basis of the discharge plasma generated in a pulse shape has: a first input unit 14; a first simulation unit 16; a first regression unit 18; a first measurement value unit 20; a first evaluation unit 22; and a control unit 24 for triggering the discharge switch of the resonance charging circuit.