METHOD OF MANUFACTURING MIXED POWDER CONTAINING NOBLE METAL POWDER AND OXIDE POWDER AND MIXED POWDER CONTAINING NOBLE METAL POWDER AND OXIDE POWDER

摘要

PROBLEM TO BE SOLVED: To provide a mixed powder of a noble metal powder and an oxide powder having low contents of chlorine and nitrogen impurities and fine powder particle diameter, suitable for use with a raw material for manufacturing sputtering targets.SOLUTION: There is provided a mixed powder containing a noble metal powder and an oxide powder, containing chlorine of less than 1000 ppm and nitrogen of less than 1000 ppm and having 90% or more of a particle diameter of the noble metal powder of 20μm or less and 90% or more of a particle diameter of the oxide powder of 12μm or less. The mixed powder of the noble metal powder and the oxide powder is obtained by mixing a powder of a noble metal ammonium salt and the oxide powder, roasting the mixed powder and removing ammonium chloride.