发明名称 PROCESSING APPARATUS AND OPTICAL MEMBER MANUFACTURING METHOD
摘要 There is provided a processing apparatus and an optical member manufacturing method that can improve the figure accuracy and the waviness accuracy, and can highly and precisely process an optical element surface. A processing apparatus generates a pressure between a polishing member and a workpiece and relatively moves the polishing member and the workpiece to process a workpiece. The processing apparatus includes a support member that can perform oscillating movement, and a processing portion that is rotatably attached to the support member. The processing portion includes one or more pressure generation units to generate different pressures between the polishing member and the workpiece.
申请公布号 US2014248824(A1) 申请公布日期 2014.09.04
申请号 US201214342700 申请日期 2012.08.29
申请人 Satake Kensuke;Ando Manabu;Nonaka Yoshifumi 发明人 Satake Kensuke;Ando Manabu;Nonaka Yoshifumi
分类号 B24B13/02 主分类号 B24B13/02
代理机构 代理人
主权项 1. A processing apparatus that generates a pressure between a polishing member and a workpiece and relatively moves the polishing member and the workpiece to process a workpiece, the processing apparatus comprising: a support member that can perform oscillating movement; and a processing portion that is rotatably attached to the support member, wherein the processing portion includes a plurality of pressure generation units to generate different pressures between the polishing member and the workpiece.
地址 Utsunomiya-shi JP