| 摘要 |
A scanned ultraviolet-light emitting diode (UV-LED) exposure device, exposing a large area by using a periodic UV-LED exposure light source with a fixed rate in an exposure task without a need of stopping movement of the device, so as to periodically repeat a use of an exposure light source to increase a use efficiency of the energy source, resulting in an improved uniformity of exposure, with the LEDs alternatively arranged policy, which further results in an improved yield. In addition, the overall design of the upper and lower exposure stations and the periodic moving ring assembly sufficiently employs the available space, and results in a reduced volume, a corresponding production space, energy consumption and production cost. |
| 主权项 |
1. A scanned ultraviolet-light emitting diode (UV-LED) exposure device, comprising:
a set of upper exposure station and a lower exposure station having a distance therebetween, the upper exposure station having a lower surface and the lower exposure station having an upper surface, each of the lower and upper surfaces having a substrate coated with a resist layer composed of a photo-sensitive material thereon, and the respective substrate of the upper and lower exposure stations being taken as a linear object exposure area having a vertical direction; a UV-LED illumination unit, being a 2-D matrix composed of a plurality of LEDs lying on a plurality of stripes, each of the stripes having a designated number of LEDs, respectively, having a horizontal direction and a vertical direction and arranged in parallel, being separated from each other for each pair of adjacent ones thereamong, having one of the designated number of LEDs in the horizontal direction thereof and having the vertical direction in perpendicular with the vertical direction of the linear object exposure area; and a periodic moving ring assembly, arranged on a center position between the upper and lower exposure stations in the exposure unit, having a first end, a second end, an inner circumference and an outer circumference having the plurality of UV-LED stripes thereon, wherein the periodic moving ring assembly continuously moves in an exposure task in a fixed rate, so as to expose the linear object exposure area of the upper and lower exposure stations. |
