OPTICAL ELEMENT SUBSTRATE, OPTICAL ELEMENT PACKAGE, METHOD FOR MANUFACTURING OPTICAL ELEMENT SUBSTRATE, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT PACKAGE

摘要

PROBLEM TO BE SOLVED: To provide an optical element substrate capable of maintaining high reflectance and having high adhesion between a ceramic substrate and a wiring pattern formed thereon.SOLUTION: An optical element substrate comprises: a ceramic substrate 10; an intermediate layer 11 formed on the ceramic substrate 10; and a wiring pattern 12 formed on the intermediate layer 11. The intermediate layer 11 is a transparent and insulating metal oxide film. In a plan view, a part of the intermediate layer 11 is formed in a region in which the wiring pattern 12 at least on the ceramic substrate 10 is not formed.