SCANNING ELECTRON MICROSCOPE

摘要

Provided is a scanning electron microscope capable of collecting electric charges accumulated on a sample. The scanning electron microscope includes a column unit configured to generate an electron beam and scan a sample with the electron beam, a chamber unit combined with the column unit, and including a sample stage spaced apart from an end of the column unit to accommodate the sample therein, a detection unit configured to detect signals emitted from the sample, a charge collecting unit disposed between the end of the column unit and the sample stage to collect electric charges, and a voltage supply unit configured to apply an optimum or, alternatively, desirable voltage to the charge collecting unit.

主权项

1. A scanning electron microscope comprising:
a column unit configured to generate an electron beam and scan a sample with the electron beam; a chamber unit combined with the column unit, the chamber unit including a sample stage spaced apart from an end of the column unit such that the sample can fit in the sample stage; a detection unit configured to detect signals emitted from the sample; a charge collecting unit disposed between the end of the column unit and the sample stage, the charge collecting unit being configured to collect electric charges; and a voltage supply unit configured to apply a voltage to the charge collecting unit.