METHOD FOR OBTAINING A NANO-CAPSULE STRUCTURE

摘要

The present invention concerns a method for obtaining a nano-capsule (4) structure (S) comprising at least one capsule (4) nanometric in size capable of enabling the encapsulation a compound, in which: - at least one layer of resin (5) is deposited on a layer of substrate (6); - said layer of resin (5) is structured, by low voltage electron lithography, or by optical lithography or by nanoimprinting in such a way as to obtain at least one cavity (7) in the thickness of said layer of resin (5), said cavity (7) having a depth p smaller than the thickness E of said layer of resin (5); - at least one layer of an encapsulating material (8) is isotropically deposited by sputtering said material (8) under vacuum; - the cavity or cavities (7) are sealed with a sealing material (10); - the layer of resin (5) is dissolved by soaking in a suitable solvent.