| 摘要 |
PROBLEM TO BE SOLVED: To prevent the side face of a produced film from having a slope shape, in thickening of the film by utilizing cold spray.SOLUTION: A film deposition method includes steps for: (A) bringing a wall member into contact with the edge of a film deposition target surface of a substrate; (B) depositing a film by a cold spray method onto the film deposition target surface; and (C) removing the wall member after the thickness of the film formed on the film deposition target surface reaches a desired film thickness. |
