| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage device capable of bringing a center of a rotation axis of a rotary stage into line with a center of an observation visual field of an object lens even when the rotary stage is rotated after an XY stage is moved.SOLUTION: A stage device 3 comprises a first clutch mechanism 34 capable of transmitting power from an XY stage 32 to a specimen support 33. When a rotary stage 31 is rotated, the first clutch mechanism 34 does not transmit power from the XY stage 32 to the specimen support 33 and when the XY stage 32 is moved, on the other hand, the first clutch mechanism 34 transmits power from the XY stage 32 to the specimen support 33.</p> |
