发明名称 |
FAULT DETECTING SYSTEM AND FAULT DETECTING METHOD |
摘要 |
A fault detecting system includes a representative value storing portion that stores, as a representative value, a combination of a maximum value for a state quantity rate-of-change and a state quantity when the state quantity rate-of-change reaches the maximum value, a rate-of-change calculating portion that calculates the state quantity rate-of-change based on state quantity data acquired by a data acquiring portion, and a representative value updating portion that updates representative values stored in the representative value storing portion, to a most recent state quantity rate-of-change calculated by the rate-of-change calculating portion and a most recent state quantity that has been acquired by the data acquiring portion, when the absolute value of the most recent state quantity rate-of-change that has been calculated by the rate-of-change calculating portion is larger than the absolute value of the maximum value for the state quantity rate-of-change that is stored in the representative value storing portion. |
申请公布号 |
US2014249777(A1) |
申请公布日期 |
2014.09.04 |
申请号 |
US201414196467 |
申请日期 |
2014.03.04 |
申请人 |
Azbil Corporation |
发明人 |
TANAKA Masato |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
1: A fault detecting system comprising:
a data acquiring portion that acquires, as state quantities for process volumes, time series data of the state quantity; a representative value storing portion that stores, as a representative value, a combination of the maximum value for a state quantity rate-of-change and the state quantity when the state quantity rate-of-change reached the maximum value; a rate-of-change calculating portion that calculates a state quantity rate-of-change based on state quantity data acquired by the data acquiring portion; a representative value updating portion that updates the representative values that are stored in the representative value storing portion to a combination of the most recent state quantity rate-of-change calculated by the rate-of-change calculating portion and the most recent state quantity acquired by the data acquiring portion, when the absolute value of the most recent state quantity rate-of-change calculated by the rate-of-change calculating portion is larger than the absolute value of the maximum value of the state quantity rate-of-change stored in the representative value storing portion; and a resetting portion that resets, to a minimum value, the maximum value of the state quantity rate-of-change stored in the representative value storing portion, when a reset signal has been received from the outside. |
地址 |
Tokyo JP |