发明名称 FAULT DETECTING SYSTEM AND FAULT DETECTING METHOD
摘要 A fault detecting system includes a representative value storing portion that stores, as a representative value, a combination of a maximum value for a state quantity rate-of-change and a state quantity when the state quantity rate-of-change reaches the maximum value, a rate-of-change calculating portion that calculates the state quantity rate-of-change based on state quantity data acquired by a data acquiring portion, and a representative value updating portion that updates representative values stored in the representative value storing portion, to a most recent state quantity rate-of-change calculated by the rate-of-change calculating portion and a most recent state quantity that has been acquired by the data acquiring portion, when the absolute value of the most recent state quantity rate-of-change that has been calculated by the rate-of-change calculating portion is larger than the absolute value of the maximum value for the state quantity rate-of-change that is stored in the representative value storing portion.
申请公布号 US2014249777(A1) 申请公布日期 2014.09.04
申请号 US201414196467 申请日期 2014.03.04
申请人 Azbil Corporation 发明人 TANAKA Masato
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项 1: A fault detecting system comprising: a data acquiring portion that acquires, as state quantities for process volumes, time series data of the state quantity; a representative value storing portion that stores, as a representative value, a combination of the maximum value for a state quantity rate-of-change and the state quantity when the state quantity rate-of-change reached the maximum value; a rate-of-change calculating portion that calculates a state quantity rate-of-change based on state quantity data acquired by the data acquiring portion; a representative value updating portion that updates the representative values that are stored in the representative value storing portion to a combination of the most recent state quantity rate-of-change calculated by the rate-of-change calculating portion and the most recent state quantity acquired by the data acquiring portion, when the absolute value of the most recent state quantity rate-of-change calculated by the rate-of-change calculating portion is larger than the absolute value of the maximum value of the state quantity rate-of-change stored in the representative value storing portion; and a resetting portion that resets, to a minimum value, the maximum value of the state quantity rate-of-change stored in the representative value storing portion, when a reset signal has been received from the outside.
地址 Tokyo JP