METHOD FOR DETERMINING SUBSTRATE TRANSPORTATION PATH, SUBSTRATE TRANSPORTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM FOR PERFORMING THE METHOD

摘要

A substrate transportation path is determined by first determining a trajectory of a first straight line passing through a start point, calculating a trajectory of a circular arc in contact with the first straight line, calculating a trajectory of a second straight line in contact with the circular arc and passing through the end point, then, if the position of the end point is changed, re-calculating the second straight line as a straight line passing through the changed end point and in contact with the circular arc, and allowing the center of the substrate holding unit to move on the first straight line, and then, move on the circular arc from a first contact point, followed by moving on the second straight line from a second contact point so as to reach the end point.

主权项

1. A method for determining a substrate transportation path when moving a substrate holding unit of a substrate transport robot from a predetermined start point to an end point in order to transport a substrate held in the substrate holding unit, the method comprising:
determining a trajectory of a first straight line passing through the start point; calculating a trajectory of a circular arc in contact with the first straight line; calculating a trajectory of a second straight line in contact with the circular arc and passing through the end point; if the position of the end point is changed, re-calculating the second straight line as a straight line passing through the changed end point without changing a radius of the circular arc and in contact with the circular arc; and allowing the center of the substrate holding unit to move on the first straight line, and then, move on the circular arc from a contact point between the first straight line and the circular arc, followed by moving on the second straight line from a contact point between the circular arc and the second straight line so as to reach the end point.