发明名称 Method of Studying a Cryogenic Sample in an Optical Microscope
摘要 The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap.
申请公布号 US2014248649(A1) 申请公布日期 2014.09.04
申请号 US201414196178 申请日期 2014.03.04
申请人 FEI Company 发明人 Mayer Tobias;Daum Rainer;Geisbauer Matthias;Gerardus Schampers Rudolf Johannes Peter;Wilhelmus Ge Persoon Johannes Antonius Hendricus
分类号 C12Q1/02 主分类号 C12Q1/02
代理机构 代理人
主权项 1. A method of studying a sample using an optical microscope, comprising the following steps: providing the sample in a sample holder comprising means to maintain the sample at a temperature T below 273 K; providing a microscope objective lens having an extremal lens element proximal the sample holder, the objective lens in a thermally insulating jacket; bringing the lens into a focus position proximal the sample, the extremal lens element and sample being separated by an intervening space; providing a transparent window in said intervening space, with a gap between the window and the extremal lens element and a gap between the between the window and the sample; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow: is non-laminar; anddoes not excite substantial acoustic vibration in a structure proximal the gap.
地址 Hillsboro OR US