发明名称 |
Method of Studying a Cryogenic Sample in an Optical Microscope |
摘要 |
The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap. |
申请公布号 |
US2014248649(A1) |
申请公布日期 |
2014.09.04 |
申请号 |
US201414196178 |
申请日期 |
2014.03.04 |
申请人 |
FEI Company |
发明人 |
Mayer Tobias;Daum Rainer;Geisbauer Matthias;Gerardus Schampers Rudolf Johannes Peter;Wilhelmus Ge Persoon Johannes Antonius Hendricus |
分类号 |
C12Q1/02 |
主分类号 |
C12Q1/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method of studying a sample using an optical microscope, comprising the following steps:
providing the sample in a sample holder comprising means to maintain the sample at a temperature T below 273 K; providing a microscope objective lens having an extremal lens element proximal the sample holder, the objective lens in a thermally insulating jacket; bringing the lens into a focus position proximal the sample, the extremal lens element and sample being separated by an intervening space; providing a transparent window in said intervening space, with a gap between the window and the extremal lens element and a gap between the between the window and the sample; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow:
is non-laminar; anddoes not excite substantial acoustic vibration in a structure proximal the gap. |
地址 |
Hillsboro OR US |