MEMS DEVICE, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A MEMS device includes a substrate and a vibrator. The vibrator includes a first conductive layer and a second conductive layer. The first conductive layer is arranged on a principal plane of the substrate and includes a first fixed electrode. The second conductive layer includes an upper electrode and a support electrode. The upper electrode is spaced apart from the first fixed electrode, has an area overlapping the first fixed electrode. The support electrode connects a second fixed electrode connected to the principal plane with one edge of the upper electrode. The upper electrode includes a plurality of driving electrodes divided by a slit-shaped notch extending in a direction from a vibration tip portion to a vibration base portion where the vibration base portion is the one edge of the upper electrode and the vibration tip portion is the other edge.

主权项

1. A MEMS device comprising:
a substrate; and a vibrator, wherein the vibrator includes
a first fixed electrode located above a principal plane of the substrate,an upper electrode spaced apart from the first fixed electrode and having an area overlapping the first fixed electrode as viewed in a normal direction of the principal plane, anda support electrode connected to one edge of the upper electrode, and the upper electrode includes a plurality of driving electrodes divided by at least one slit-shaped notch extending in a direction from the other edge of the upper electrode to the support electrode.